HIGH-RESOLUTION DEPTH PROFILING OF NONCONDUCTING SAMPLES WITH SNMS

被引：16
|
作者：
BOCK, W
KOPNARSKI, M
OECHSNER, H
机构：
[1] UNIV KAISERSLAUTERN,FACHBEREICH PHYS,D-67663 KAISERSLAUTERN,GERMANY
[2] UNIV KAISERSLAUTERN,INST OBERFLACHEN & SCHICHTANALYT,D-67663 KAISERSLAUTERN,GERMANY
来源：
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1995年 / 353卷 / 5-8期
关键词：
D O I：
10.1007/BF00321312
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Beat-like signal modulations in sputter depth profiles of multilayer structures are shown to enable an estimation and the optimization of the homogeneity of the sputter erosion process. Using W-Si multilayer structures of 69 doublelayers with a thickness of 40 Angstrom, it is shown that the high-frequency mode (HFM) of electron-gas SNMS (e(-)-gas SNMS) for the analysis of insulators provides the same high depth resolution as the conventional direct-bombardment mode (DBM) of this technique.
引用
收藏
页码：510 / 513
页数：4
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