TRANSFER LEAK STUDIES AND COMPARISONS OF PRIMARY LEAK STANDARDS AT THE NATIONAL-BUREAU-OF-STANDARDS AND SANDIA-NATIONAL-LABORATORIES

被引：15

|

作者：

HYLAND, RW ^{[1
]}

EHRLICH, CD ^{[1
]}

TILFORD, CR ^{[1
]}

THORNBERG, S ^{[1
]}

机构：

[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573922

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：334 / 337

页数：4

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