共 50 条
- [21] PLASMA FILAMENT ION-SOURCE FOR HIGH-CURRENT IMPLANTER NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 190 - 193
- [22] THE MEVVA ION-SOURCE FOR HIGH-CURRENT METAL-ION IMPLANTATION NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 201 - 204
- [23] VERY HIGH-CURRENT ECR ION-SOURCE FOR AN OXYGEN ION IMPLANTER NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 178 - 181
- [25] HIGH-CURRENT SPUTTERING ION-SOURCE FOR REFRACTORY-METALS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 70 (1-4): : 200 - 204
- [26] METAL BEAM PRODUCTION USING A HIGH-CURRENT ION-SOURCE NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 74 - 77
- [27] A HIGH-CURRENT PULSED ION-SOURCE FOR METALLIC-IONS BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (02): : 128 - 128
- [28] NEW HIGH-CURRENT LOW-ENERGY ION-SOURCE JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (03): : L252 - L253
- [30] NEW HIGH-CURRENT LOW-ENERGY ION-SOURCE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 366 - 368