THEORY OF ELLIPSOMETRY METHOD .2. EFFECT OF RADIATION SOURCE HETEROGENEITY ON ACCURACY OF METHOD

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作者：

SEMENENKO, AI

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来源：

OPTIKA I SPEKTROSKOPIYA | 1975年 / 39卷 / 05期

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中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

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页码：967 / 972

页数：6

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