LOW-LOSS OPTICAL-WAVEGUIDES USING PLASMA-DEPOSITED SILICON-NITRIDE

被引：14

|

作者：

SRIRAM, S

PARTLOW, WD

LIU, CS

机构：

来源：

APPLIED OPTICS | 1983年 / 22卷 / 23期

关键词：

D O I：

10.1364/AO.22.003664

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：3664 / 3665

页数：2

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