EFFECTS OF PREADSORBED OXYGEN CONTAMINANT ON ADSORPTION OF AL ON SI (111)

被引：3
|
作者：
BELLINA, JJ [1 ]
机构：
[1] MCDONNELL DOUGLAS CORP,RES LABS,ST LOUIS,MO 63166
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 06期
关键词：
D O I：
10.1116/1.1318696
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1133 / 1140
页数：8
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