A MULTIPLE PASS APPLICATION OF THE BOLTZMANN TRANSPORT-EQUATION FOR CALCULATING ION-IMPLANTATION PROFILES AT LOW ENERGIES

被引：25

|

作者：

GILES, MD

GIBBONS, JF

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

D O I：

10.1016/0167-5087(83)90778-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：33 / 36

页数：4

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