DESIGN AND PERFORMANCE OF A QUARTZ OSCILLATOR VACUUM GAUGE WITH A CONTROLLER

被引：20
|
作者：
ONO, M [1 ]
HIRATA, M [1 ]
KOKUBUN, K [1 ]
MURAKAMI, H [1 ]
TAMURA, F [1 ]
HOJO, H [1 ]
KAWASHIMA, H [1 ]
KYOGOKU, H [1 ]
机构：
[1] SEIKO INST & ELECTR LTD,KOTO,TOKYO 136,JAPAN
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.573012
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1746 / 1749
页数：4
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