Oscillator ionization vacuum gauge with field emitters

被引:0
|
作者
Nicolaescu, Dan [1 ]
Kanemaru, Seigo [1 ]
Filip, Valeriu [2 ]
Filip, Lucian Dragos [2 ]
Itoh, Junji [1 ]
机构
[1] Nanoelectronics Research Institute, AIST, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
[2] University of Bucharest, Faculty of Physics, P.O. Box MG-11, Bucharest-Magurele 76900, Romania
关键词
Computer simulation - Electric field effects - Electrodes - Electron emission - Electron sources - Ionization - Magnetic field effects - Mathematical models - Microelectronics - Molecules;
D O I
10.1143/jjap.41.5945
中图分类号
学科分类号
摘要
A novel ionization vacuum gauge with field emitters is proposed and analyzed. The device comprises field emitters as a source of electrons, two ring-shaped coaxial electrodes and a box-shaped external electrode for ion collection. Under special conditions regarding the device geometry and applied potentials, the electrons feature oscillatory motion, their trajectories being confined to a region around the device symmetry axis. The microelectronic structure may be operated in small areas such as inside sealed field emission displays.
引用
收藏
页码:5945 / 5950
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