ION-BEAM PROCESSING USING METAL ON POLYMER MASKS

被引：10
|
作者：
HU, EL
HOWARD, RE
GRABBE, P
TENNANT, DM
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 05期
关键词：
D O I：
10.1149/1.2119911
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1171 / 1173
页数：3
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