INFLUENCE OF SUBSTRATE MATERIAL ON THE INITIAL THIN-FILM GROWTH DURING ION DEPOSITION FROM A GLOW-DISCHARGE

被引：8
|
作者：
BERG, S
GELIN, B
SVARDSTROM, A
BABULANAM, SM
机构：
来源：
VACUUM | 1984年 / 34卷 / 10-1期
关键词：
D O I：
10.1016/0042-207X(84)90180-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：969 / 973
页数：5
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