DIELECTRIC-RELAXATION AND CHARGING AND L/F FLICKER VOLTAGE NOISE IN SILICON-NITRIDE THIN INSULATING FILMS

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SIEGEL, E

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 03期

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O646 [电化学、电解、磁化学];

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081704 ;

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页码：C101 / C102

页数：2

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