GROWTH OF GAAS AND INP ON SI USING PLASMA STIMULATED MOCVD

被引:4
|
作者
LEIBER, J [1 ]
BRAUERS, A [1 ]
HEINECKE, H [1 ]
LUTH, H [1 ]
BALK, P [1 ]
机构
[1] AACHEN TECH UNIV,INST PHYS 2,D-5100 AACHEN,FED REP GER
关键词
D O I
10.1016/0022-0248(89)90042-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:483 / 489
页数:7
相关论文
共 50 条
  • [21] DOWNSTREAM PLASMA DEPOSITION OF SINX ON SI, INP AND IN-GAAS
    DZIOBA, S
    MEIKLE, S
    STREATER, RW
    JOURNAL OF ELECTRONIC MATERIALS, 1986, 15 (05) : 316 - 317
  • [22] Growth of high-quality epitaxy of GaAs on Si with engineered Ge buffer using MOCVD
    Yong Du
    Buqing Xu
    Guilei Wang
    Shihai Gu
    Ben Li
    Zhenzhen Kong
    Jiahan Yu
    Guobin Bai
    Junjie Li
    Wenwu Wang
    Henry H. Radamson
    Journal of Materials Science: Materials in Electronics, 2021, 32 : 6425 - 6437
  • [23] Growth of high-quality epitaxy of GaAs on Si with engineered Ge buffer using MOCVD
    Du, Yong
    Xu, Buqing
    Wang, Guilei
    Gu, Shihai
    Li, Ben
    Kong, Zhenzhen
    Yu, Jiahan
    Bai, Guobin
    Li, Junjie
    Wang, Wenwu
    Radamson, Henry H.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2021, 32 (05) : 6425 - 6437
  • [24] Metamorphic heterostructure InP/GaAsSb/InP HBTs on GaAs substrates by MOCVD
    Zhou, Wei
    Tang, Chak Wah
    Zhu, Jia
    Lau, Kei May
    Zeng, Y.
    Liu, H. G.
    Tao, N. G.
    Bolognes, C. R.
    IEEE ELECTRON DEVICE LETTERS, 2007, 28 (07) : 539 - 542
  • [25] SELECTIVE MOCVD GROWTH OF GAAS ON SI SUBSTRATE WITH SUPERLATTICE INTERMEDIATE LAYERS
    SOGA, T
    SAKAI, S
    UMENO, M
    HATTORI, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (02): : 252 - 255
  • [26] EPITAXIAL-GROWTH AND MATERIAL PROPERTIES OF GAAS ON SI GROWN BY MOCVD
    SOGA, T
    HATTORI, S
    SAKAI, S
    UMENO, M
    JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 498 - 502
  • [27] Growth and Characterization of MOCVD grown InP Quantum Dots on Si for Monolithic Integration
    Halder, Nripendra N.
    Kundu, Souvik
    Mukherjee, Rabibrata
    Biswas, D.
    Banerji, P.
    PHYSICS OF SEMICONDUCTOR DEVICES, 2014, : 647 - 650
  • [28] MOCVD GROWTH OF GAAS ON SI SUBSTRATES WITH ALGAP AND STRAINED SUPERLATTICE LAYERS
    SOGA, T
    HATTORI, S
    SAKAI, S
    TAKEYASU, M
    UMENO, M
    ELECTRONICS LETTERS, 1984, 20 (22) : 916 - 918
  • [29] Radical assisted MOCVD for ZnSe crystal growth on Si and GaAs substrates
    Aoki, T
    Morita, M
    Nakanishi, Y
    Hatanakra, Y
    PROCEEDINGS OF THE THIRTEENTH INTERNATIONAL CONFERENCE ON CHEMICAL VAPOR DEPOSITION, 1996, 96 (05): : 354 - 359
  • [30] MOCVD GROWTH OF GAAS0.6P0.4 ON SI SUBSTRATE
    TAKEYASU, M
    SOGA, T
    SAKAI, S
    UMENO, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (04): : L297 - L298