PHOTOCHEMICAL VAPOR-DEPOSITION IN SILICON DIOXIDE

被引：0

作者：

PETERS, JW

ROGERS, HN

HALL, JT

YEE, EM

RHIGER, DR

机构：

[1] HUGHES AIRCRAFT CO,CULVER CITY,CA 90230

[2] SANTA BARBARA RES CTR,GOLETA,CA 93017

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C104 / C104

页数：1

共 50 条

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