AN IMPROVED DETECTION SYSTEM FOR ELECTRICAL MICROCHARACTERIZATION IN A SCANNING ELECTRON-MICROSCOPE

被引：3
|
作者：
LESNIAK, M
UNVALA, BA
HOLT, DB
机构：
来源：
JOURNAL OF MICROSCOPY-OXFORD | 1984年 / 135卷 / SEP期
关键词：
D O I：
10.1111/j.1365-2818.1984.tb02532.x
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
引用
收藏
页码：255 / 274
页数：20
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