FLEXIBLE MEGAVOLT SYSTEM FOR ION-IMPLANTATION AND ION-BEAM ANALYSIS

被引：3

作者：

VANOOSTERHOUT, HAP

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(89)91037-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：522 / 525

页数：4

共 50 条

[41] ION-BEAM ANALYSIS
FUJIMOTO, F
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[42] HIGH-INTENSITY 1.5 MEGAVOLT HEAVY-ION PREACCELERATOR FOR ION-BEAM FUSION
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[43] ION-IMPLANTATION
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[44] BEAM PROFILE AND EMITTANCE MEASUREMENTS FOR ION-IMPLANTATION
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[50] ION-IMPLANTATION
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