MAGNETRON SPUTTERING OF PERMALLOY FOR THIN-FILM HEADS

被引：11
|
作者：
POTZLBERGER, HW
机构：
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1984年 / 20卷 / 05期
关键词：
D O I：
10.1109/TMAG.1984.1063356
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：851 / 853
页数：3
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