COMPARATIVE-STUDY OF ION MILLING TECHNIQUES IN CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPE SPECIMEN PREPARATION

被引：4
|
作者：
ZIELINSKI, EM
TRACY, B
机构：
[1] INTEL CORP,SANTA CLARA,CA 95052
[2] STANFORD UNIV,DEPT MAT SCI,STANFORD,CA 94305
来源：
MICROSCOPY RESEARCH AND TECHNIQUE | 1992年 / 22卷 / 02期
关键词：
VLSIC; XTEM; SEMICONDUCTOR INDUSTRY;
D O I：
10.1002/jemt.1070220209
中图分类号：
R602 [外科病理学、解剖学]; R32 [人体形态学];
学科分类号：
100101 ;
摘要：
[No abstract available]
引用
收藏
页码：199 / 206
页数：8
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