MATERIAL REACTION AND SILICIDE FORMATION AT THE REFRACTORY-METAL SILICON INTERFACE

被引：40
|
作者：
RUBLOFF, GW [1 ]
TROMP, RM [1 ]
VANLOENEN, EJ [1 ]
机构：
[1] INST ATOM & MOLEC PHYS,1098 SJ AMSTERDAM,NETHERLANDS
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 23期
关键词：
D O I：
10.1063/1.96829
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1600 / 1602
页数：3
相关论文
共 50 条
  • [41] SILICIDE FORMATION ON POLYCRYSTALLINE SILICON BY DIRECT METAL IMPLANTATION
    KOZICKI, MN
    ROBERTSON, JM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (03) : 878 - 881
  • [42] PULSE SOURCE OF REFRACTORY-METAL PLASMA
    MURAVYOV, II
    GORBUNOVA, TM
    YANCHARINA, AM
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1988, 31 (04): : 48 - 52
  • [43] JOINING IN REFRACTORY-METAL HEAT PIPES
    LUNDBERG, LB
    MERRIGAN, MA
    MARTINEZ, HE
    KEDDY, ES
    JOURNAL OF METALS, 1983, 35 (12): : 84 - 84
  • [44] REFRACTORY-METAL SILICIDES IN MICROELECTRONIC VLSI
    DENEUVILLE, A
    ANNALES DE CHIMIE-SCIENCE DES MATERIAUX, 1986, 11 (08): : 603 - 613
  • [45] NONMETAL REFRACTORY-METAL SURFACE INTERACTIONS
    HORZ, G
    JOURNAL OF METALS, 1987, 39 (10): : A70 - A70
  • [46] PLASMACHEM PROCESS OF PRODUCING REFRACTORY AND REFRACTORY-METAL POWDERS
    DAVIS, RD
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1974, : 37 - 37
  • [47] AMORPHOUS SILICIDE FORMATION BY THERMAL-REACTION - A COMPARISON OF SEVERAL METAL-SILICON SYSTEMS
    HOLLOWAY, K
    SINCLAIR, R
    NATHAN, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 1479 - 1483
  • [48] REFRACTORY-METAL SILICIDES FOR VLSI APPLICATIONS
    SINHA, AK
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03): : 778 - 785
  • [49] THERMOEMISSION PROPERTIES OF REFRACTORY-METAL BORIDES
    SAMSONOV, GV
    FOMENKO, VS
    KUNITZKIJ, JA
    REVUE INTERNATIONALE DES HAUTES TEMPERATURES ET DES REFRACTAIRES, 1973, 10 (01): : 11 - 14
  • [50] REFRACTORY-METAL THERMOCOUPLES CONTAINING RHENIUM
    SIMS, CT
    GAINES, GB
    JAFFEE, RI
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1959, 30 (02): : 112 - 115
12345