INFLUENCE OF AU AS AN IMPURITY IN NI-SILICIDE GROWTH

被引：13
|
作者：
HUNG, LS [1 ]
ZHENG, LR [1 ]
MAYER, JW [1 ]
机构：
[1] CORNELL UNIV,DEPT MAT SCI,ITHACA,NY 14853
来源：
JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 02期
关键词：
D O I：
10.1063/1.332037
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：792 / 795
页数：4
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