PROFILING OF STRESS-INDUCED INTERFACE STATES IN SHORT CHANNEL MOSFETS USING A COMPOSITE CHARGE PUMPING TECHNIQUE

被引:25
|
作者
HADDARA, H
CRISTOLOVEANU, S
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D O I
10.1016/0038-1101(86)90177-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:767 / 772
页数:6
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