THIN-FILMS PREPARED BY PLASMA POLYMERIZATION OF METHYL-METHACRYLATE AND THEIR PROPERTIES AS AN ELECTRON-BEAM RESIST

被引：7
|
作者：
MARTINU, L
BIEDERMAN, H
机构：
来源：
VACUUM | 1983年 / 33卷 / 05期
关键词：
D O I：
10.1016/0042-207X(83)90088-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：253 / 254
页数：2
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