THIN-FILMS PREPARED BY PLASMA POLYMERIZATION OF METHYL-METHACRYLATE AND THEIR PROPERTIES AS AN ELECTRON-BEAM RESIST

被引：7

|

作者：

MARTINU, L

BIEDERMAN, H

机构：

来源：

VACUUM | 1983年 / 33卷 / 05期

关键词：

D O I：

10.1016/0042-207X(83)90088-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：253 / 254

页数：2

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