PASSING OF ELECTRON-BEAMS THROUGH A LAMINATED ELECTRONORESIST

被引：0
|
作者：
KORNYUSHKIN, YD
机构：
[1] Leningrad Inst of Precision, Mechanics & Optics, Leningrad,, USSR, Leningrad Inst of Precision Mechanics & Optics, Leningrad, USSR
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 95卷 / 01期
关键词：
D O I：
10.1002/pssa.2210950163
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
4
引用
收藏
页码：K81 / K86
页数：6
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