EFFECT OF STOICHIOMETRIC DISTURBANCES IN AIIIBV COMPOUNDS DURING ION-IMPLANTATION

被引：6
|
作者：
MAKSIMOV, SK
EGOROV, VL
KRYUK, VV
PISKUNOV, DI
PITIRIMOVA, EA
VESELOV, VF
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 73卷 / 02期
关键词：
D O I：
10.1002/pssa.2210730273
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：K283 / K285
页数：3
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