OPTICAL IMAGING APPLIED TO MICROELECTRONIC CHIP-TO-CHIP INTERCONNECTIONS

被引：98
|
作者：
KOSTUK, RK
GOODMAN, JW
HESSELINK, L
机构：
来源：
APPLIED OPTICS | 1985年 / 24卷 / 17期
关键词：
D O I：
10.1364/AO.24.002851
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：2851 / 2858
页数：8
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