DIELECTRIC-CONSTANT AND DISSIPATION FACTOR IN LTCVD SIO2-FILMS

被引：0
|
作者：
COBIANU, C
PAVELESCU, C
CATUNEANU, VM
机构：
[1] MICROELECTR,R-72996 BUCHAREST,ROMANIA
[2] POLYTECH INST BUCHAREST,R-76206 BUCHAREST,ROMANIA
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：C105 / C106
页数：2
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