10 NM RESOLUTION XY-STAGE AND ALIGNMENT SYSTEM FOR SYNCHROTRON RADIATION X-RAY STEPPER

被引：0

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作者：

KOUNO, E

TANAKA, Y

IWATA, J

TASAKI, Y

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来源：

NEC RESEARCH & DEVELOPMENT | 1988年 / 90期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：70 / 76

页数：7

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