10 NM RESOLUTION XY-STAGE AND ALIGNMENT SYSTEM FOR SYNCHROTRON RADIATION X-RAY STEPPER

被引：0
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作者：
KOUNO, E
TANAKA, Y
IWATA, J
TASAKI, Y
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来源：
NEC RESEARCH & DEVELOPMENT | 1988年 / 90期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：70 / 76
页数：7
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