TRANSPARENT CONDUCTIVE SN-DOPED INDIUM OXIDE COATINGS DEPOSITED BY REACTIVE SPUTTERING WITH A POST CATHODE

被引：48
|
作者：
THORNTON, JA [1 ]
HEDGCOTH, VL [1 ]
机构：
[1] TELIC CORP,1631 COLORADO AVE,SANTA MONICA,CA 90404
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期
关键词：
D O I：
10.1116/1.568876
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：117 / 121
页数：5
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