ON-MACHINE MEASUREMENT OF LARGE MIRROR PROFILE BY MIXED METHOD

被引：4

作者：

KIYONO, S ^{[1
]}

GAO, W ^{[1
]}

机构：

[1] TOHOKU UNIV,GRAD SCH,SENDAI,MIYAGI 980,JAPAN

来源：

JSME INTERNATIONAL JOURNAL SERIES C-DYNAMICS CONTROL ROBOTICS DESIGN AND MANUFACTURING | 1994年 / 37卷 / 02期

关键词：

MEASUREMENT; SENSOR; ON-MACHINE MEASUREMENT; DIFFERENTIAL METHOD; PROFILE MEASUREMENT; OPTICAL PROBE; MIRROR PROFILE; ACCURACY; MACHINE TOOL;

D O I：

10.1299/jsmec1993.37.300

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents a new differential method called the mixed method, which was developed to measure the profile accurately under the circumstances of on-machine measurement. In comparison with the 2-point method, this method can more remarkably reduce the datum errors due to scanning, vibration and thermal drift. This method also has the advantage of obtaining the high-frequency component of profiles accurately. An optical sensor was designed and constructed to realize both the 2-point method and the mixed method. With a modulation technique, the sensor has been made to have good thermal dritt characteristics. It can measure the displacement and angle of two points on a mirror surface simultaneously with a resolution higher than 0.1 mum and 1''. Using this sensor, an on-machine measurement system has been constructed, and measurements of the straightness of cylindrical mirrors have been attempted with the 2-point method and the mixed method. Comparing the results, the favorable characteristics of the mixed method have been confirmed.

引用

页码：300 / 306

页数：7

共 50 条

[21] On-machine dimensional measurement of large parts by compensating for volumetric errors of machine tools
Uekita, Masahiro
Takaya, Yasuhiro
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2016, 43 : 200 - 210
[22] Development of an on-machine observation and profile measurement system with an AFM and its properties
Watanabe, Y
Moriyasu, S
Katahira, K
Lin, W
Ohmori, H
Makinouchi, A
Tashiro, H
ADVANCES IN ABRASIVE TECHNOLOGY V, 2003, 238-2 : 153 - 156
[23] Uncertainty analysis of on-machine motion and profile measurement with sensor reading errors
Yang, SM
Fung, EHK
Chiu, WM
MEASUREMENT SCIENCE AND TECHNOLOGY, 2002, 13 (12) : 1937 - 1945
[24] Extension of the displacement method by measuring reference pieces using multiple sensors for on-machine surface profile measurement
Haramiishi, Y.
Rahim, Y. A.
Shimizu, T.
Ishii, T.
Ahmad, M. F. Ali
Watanabe, H.
JOURNAL OF MECHANICAL ENGINEERING AND SCIENCES, 2024, 18 (03) : 10202 - 10222
[25] A machining error compensation method using on-machine profile measurement in 3-axis aspheric grinding
Huang, Hao
Lei, Xiangyang
Wang, Jian
Xu, Qiao
He, Liangyu
Guo, Yinbiao
MATERIALS PROCESSING TECHNOLOGIES, PTS 1 AND 2, 2011, 154-155 : 390 - +
[26] ON-MACHINE CALIPER MEASUREMENT AND CONTROL
VANMUHN, PH
AMERICAN PAPER INDUSTRY, 1969, 51 (11): : 30 - &
[27] A Calibration Method of Monocular Stereo Vision System for On-machine Measurement
Wang, Zhongren
Deng, Lijun
INTERNATIONAL CONFERENCE ON IMAGE PROCESSING AND PATTERN RECOGNITION IN INDUSTRIAL ENGINEERING, 2010, 7820
[28] Study on the on-machine measurement method of NC wheel gear form grinding machine
School of Mechanical and Instrumental Engineering, Xi'an 710048, China
不详
Yi Qi Yi Biao Xue Bao, 2008, 3 (540-544):
[29] ON-MACHINE COLOR MEASUREMENT - INTRODUCTION
HUNTER, RS
TAPPI, 1969, 52 (02): : 221 - &
[30] Study on Vision based On-machine Micro Tool Measurement Method
Liu, Xiaoru
Zhang, Xi
Shang, Bo
Chi, Xianliang
PROCEEDINGS OF THE 2015 JOINT INTERNATIONAL MECHANICAL, ELECTRONIC AND INFORMATION TECHNOLOGY CONFERENCE (JIMET 2015), 2015, 10 : 1076 - 1080

← 1 2 3 4 5 →