THIN-FILMS OF SI1-XGEX DEPOSITED USING AN ABLATION TECHNIQUE

被引:0
|
作者
ANTONI, F
FOGARASSY, E
FUCHS, C
PREVOT, B
STOQUERT, JP
机构
关键词
D O I
10.1051/anphys/1994008
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:39 / 40
页数:2
相关论文
共 50 条
  • [31] MICROSTRUCTURAL EVOLUTION IN Si1-xGex:H THIN FILMS FOR PHOTOVOL TAlC APPLICATIONS
    Podraza, Nikolas J.
    Saint John, David B.
    Li, Jing
    Wronski, Christopher R.
    Dickey, Elizabeth C.
    Collins, Robert W.
    35TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, 2010,
  • [32] Micro-RBS characterisation of the chemical composition and particulate deposition on pulsed laser deposited Si1-xGex thin films
    Simon, A
    Kántor, Z
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2002, 190 : 351 - 356
  • [33] Growth Rate and Temperature Dependence of Oxygen Incorporation in Si1-xGex Thin Films
    Jackson, C. A.
    Williams, A. J.
    Deelman, P. W.
    SIGE, GE, AND RELATED MATERIALS: MATERIALS, PROCESSING, AND DEVICES 7, 2016, 75 (08): : 551 - 560
  • [34] OPTICAL AND ELECTRICAL-PROPERTIES OF HYDROGENATED AMORPHOUS SI1-XGEX ALLOY THIN-FILMS PREPARED BY PLANAR MAGNETRON SPUTTERING
    SAITO, N
    AOKI, K
    SANNOMIYA, H
    YAMAGUCHI, T
    THIN SOLID FILMS, 1984, 115 (04) : 253 - 262
  • [35] Interfacial reaction in poly Si1-xGex/ZrO2 with Ge content in poly Si1-xGex films
    Kang, SK
    Min, BG
    Yoo, JH
    Nam, SW
    Ko, DH
    Kang, HB
    Yang, CW
    Cho, MH
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2002, 5 (12) : G113 - G115
  • [36] Strain behaviors of Si1-xGex grown on oxidized and etched Si1-xGex
    Min, B. -G.
    Yoo, J. -H.
    Sohn, H. -C.
    Ko, D. -H.
    Cho, M. -H.
    Lee, T. -W.
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2008, 11 (04) : H96 - H98
  • [37] Strain relaxation in Si1-xGex thin films on Si(100) substrates:: Modeling and comparisons with experiments
    Kolluri, K
    Zepeda-Ruiz, LA
    Murthy, CS
    Maroudas, D
    Thin Films Stresses and Mechanical Properties XI, 2005, 875 : 157 - 162
  • [38] Biaxial moduli of coherent Si1-xGex films on Si (001)
    Floro, JA
    Chason, E
    Lee, SR
    Petersen, GA
    APPLIED PHYSICS LETTERS, 1997, 71 (12) : 1694 - 1696
  • [39] CBED and FE Study of Thin Foil Relaxation in Cross-Section Samples of Si/Si1-xGex and Si/Si1-xGex/Si Heterostructures
    Alexandre, L.
    Jurczak, G.
    Alfonso, C.
    Saikaly, W.
    Grosjean, C.
    Charai, A.
    Thibault, J.
    MICROSCOPY OF SEMICONDUCTING MATERIALS 2007, 2008, 120 : 415 - +
  • [40] STUDY OF THE INTERDIFFUSION OF CERAMIC THIN-FILMS DEPOSITED ON SI(100) BY LASER-ABLATION
    SANCHEZ, F
    FERRATER, C
    AGUIAR, R
    VARELA, M
    VACUUM, 1994, 45 (10-11) : 1131 - 1133