SPUTTERING OF METALS WITH LOW-ENERGY INERT GAS IONS - POSSIBLE INFLUENCE OF TRAPPED GAS

被引：4
|
作者：
SINHA, MK
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 04期
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D O I：
10.1063/1.1656508
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：2150 / &
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