SPUTTERING OF METALS WITH LOW-ENERGY INERT GAS IONS - POSSIBLE INFLUENCE OF TRAPPED GAS

被引：4

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作者：

SINHA, MK

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来源：

JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 04期

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D O I：

10.1063/1.1656508

中图分类号：

O59 [应用物理学];

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页码：2150 / &

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