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- [24] Uncertainty analysis of chamber pressure measurement based on standard copper cylinder International Journal of Simulation: Systems, Science and Technology, 2016, 17 (30): : 38.1 - 38.8
- [29] A Hybrid Total Measurement Uncertainty Methodology for Dual Beam FIB/SEM Metrology METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXIV, 2020, 11325