CHARACTERIZATION OF GAAS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION ON SI-ON-INSULATOR

被引:6
|
作者
PEARTON, SJ [1 ]
VERNON, SM [1 ]
SHORT, KT [1 ]
BROWN, JM [1 ]
ABERNATHY, CR [1 ]
CARUSO, R [1 ]
CHU, SNG [1 ]
HAVEN, VE [1 ]
BUNKER, SN [1 ]
机构
[1] SPIRE CORP,BEDFORD,MA 01730
关键词
D O I
10.1063/1.98728
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1188 / 1190
页数:3
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