CORDIS - AN IMPROVED HIGH-CURRENT ION-SOURCE FOR GASES

被引：67
|
作者：
KELLER, R [1 ]
NOHMAYER, F [1 ]
SPADTKE, P [1 ]
SCHONENBERG, MH [1 ]
机构：
[1] FACHHSCH WIESBADEN,WIESBADEN,FED REP GER
来源：
VACUUM | 1984年 / 34卷 / 1-2期
关键词：
D O I：
10.1016/0042-207X(84)90102-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：31 / 35
页数：5
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