POSITIVE RESISTS FOR DIRECT WRITE ELECTRON-BEAM LITHOGRAPHY

被引：0
|
作者：
GOZDZ, AS [1 ]
机构：
[1] BELL COMMUN RES,ORGAN MAT RES GRP,RED BANK,NJ
来源：
SOLID STATE TECHNOLOGY | 1987年 / 30卷 / 06期
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：75 / 79
页数：5
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