AUTOMATION OF RESIDUAL-GAS ANALYZERS

被引：1
|
作者：
JAMES, AP [1 ]
机构：
[1] SERC,DARESBURY LAB,WARRINGTON WA4 4AD,CHESHIRE,ENGLAND
来源：
VACUUM | 1987年 / 37卷 / 8-9期
关键词：
D O I：
10.1016/0042-207X(87)90054-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
9
引用
收藏
页码：677 / 680
页数：4
相关论文
共 50 条
  • [11] THE PERFORMANCE OF RESIDUAL-GAS ANALYZERS WHEN USED IN HIGH-VACUUM SYSTEMS
    MAO, FM
    YANG, JM
    AUSTIN, WE
    LECK, JH
    VACUUM, 1988, 38 (8-10) : 951 - 951
  • [12] COMPARATIVE TESTS OF QUADRUPOLE, MAGNETIC, AND TIME-OF-FLIGHT RESIDUAL-GAS ANALYZERS
    ABBOTT, PJJ
    KENDALL, BRF
    TROUT, KP
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 1996 - 2000
  • [13] SECTOR MASS-SPECTROMETER CALIBRATION METHODS APPLIED TO RESIDUAL-GAS ANALYZERS
    ELLEFSON, RE
    VACUUM, 1985, 35 (12) : 631 - 631
  • [14] MODIFIED RESIDUAL-GAS ANALYZERS AS SOURCES OF MASS-SELECTED ION-BEAMS
    GILBERT, JR
    LEROI, GE
    ALLISON, J
    INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1991, 107 (02): : 247 - 263
  • [15] THE SPINNING ROTOR VISCOSITY GAUGE AS A BASIS FOR THE CALIBRATION OF RESIDUAL-GAS ANALYZERS AND MASS SPECTROMERS
    REICH, G
    VACUUM, 1985, 35 (12) : 631 - 631
  • [16] RESIDUAL-GAS ANALYSIS IN A SEM
    MARSHALL, AT
    JOURNAL OF MICROSCOPY-OXFORD, 1984, 133 (JAN): : 119 - 120
  • [17] PERSPECTIVES ON RESIDUAL-GAS ANALYSIS
    LICHTMAN, D
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1984, 2 (02): : 200 - 205
  • [18] NUDE RESIDUAL-GAS ANALYZER
    ERWIN, RL
    JAROSZ, D
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1964, 1 (02): : 81 - &
  • [19] RESIDUAL-GAS CONCENTRATIONS IN EVACUATED CHAMBERS
    BOWE, JC
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1963, 34 (04): : 443 - &
  • [20] RESIDUAL-GAS BEAM PROFILE MONITOR
    KRIDER, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1989, 278 (03): : 660 - 663
12345