SAFETY HAZARD FROM GAS-DISCHARGE INTERACTIONS WITH THE BAYARD-ALPERT IONIZATION GAUGE

被引：1

|

作者：

MORRISON, CF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 05期

关键词：

D O I：

10.1116/1.572920

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

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页码：2032 / 2034

页数：3

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