SPUTTERED BI2TE3 AND PBTE THIN-FILMS

被引：45
|
作者：
SHING, YH
CHANG, Y
MIRSHAFII, A
HAYASHI, L
ROBERTS, SS
JOSEFOWICZ, JY
TRAN, N
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期
关键词：
D O I：
10.1116/1.571916
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：503 / 506
页数：4
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