SECONDARY ION MASS-SPECTROMETRY PROFILING OF SHALLOW, IMPLANTED LAYERS USING QUADRUPOLE AND MAGNETIC-SECTOR INSTRUMENTS

被引：73

作者：

VANDERVORST, W ^{[1
]}

SHEPHERD, FR ^{[1
]}

机构：

[1] BELL NO RES,OTTAWA K1Y 4H7,ONTARIO,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 03期

关键词：

D O I：

10.1116/1.574152

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：313 / 320

页数：8

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