SOLUBILITY AND THERMAL PREDEPOSITION OF PHOSPHORUS AND BORON IN SILICON

被引：0
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作者：
ANGELUCCI, R
ARMIGLIATO, A
CELOTTI, G
NEGRINI, P
NOBILI, D
OSTOJA, P
SERVIDORI, M
SOLMI, S
机构：
来源：
ELETTROTECNICA | 1977年 / 64卷 / 08期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：663 / 663
页数：1
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