MEASUREMENTS OF ELECTRON RANGE AND SCATTERING IN HIGH-VOLTAGE E-BEAM LITHOGRAPHY

被引：10
|
作者：
MANKIEWICH, PM
JACKEL, LD
HOWARD, RE
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 01期
关键词：
D O I：
10.1116/1.583204
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：174 / 176
页数：3
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