TWO-DIMENSIONAL NUMERICAL-ANALYSIS OF IMPURITY ATOM DIFFUSION IN SEMICONDUCTORS - COMMENTS

被引：0
|
作者：
MURLEY, PC
OBRIEN, RR
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1984年 / 31卷 / 07期
关键词：
D O I：
10.1109/T-ED.1984.21650
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：1005 / 1005
页数：1
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