TWO-DIMENSIONAL NUMERICAL-ANALYSIS OF IMPURITY ATOM DIFFUSION IN SEMICONDUCTORS - COMMENTS

被引：0

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作者：

MURLEY, PC

OBRIEN, RR

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1984年 / 31卷 / 07期

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D O I：

10.1109/T-ED.1984.21650

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：1005 / 1005

页数：1

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