AMPLITUDE-MODULATED INTERFEROMETRY

被引:0
|
作者
BRUNFELD, A [1 ]
SINGHER, L [1 ]
SHAMIR, J [1 ]
机构
[1] TECHNION ISRAEL INST TECHNOL,DEPT ELECT ENGN,IL-32000 HAIFA,ISRAEL
关键词
D O I
10.1364/OL.15.000774
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Specific modulating procedures of the interfering amplitudes in a double-beam interferometer lead to high-precision measurements and insensitivity to changes in reflectivity. The performance of such an interferometer is superior to that of a phase-shifting interferometer because the modulated quantity is the amplitude rather than the phase, which is the measured quantity. This system is easier to implement and may be operated faster. © 1990 Optical Society of America.
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页码:774 / 776
页数:3
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