QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY USING ELEMENTAL SENSITIVITY FACTORS

被引：96

|

作者：

PALMBERG, PW ^{[1
]}

机构：

[1] PHYS ELECTR IND INC,6509 FLYING CLOUD DR,EDEN PRAIRIE,MN 55343

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568853

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：214 / 218

页数：5

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