MASS SEPARATION IN A TURBOMOLECULAR PUMP

被引：0
|
作者：
SAWADA, T [1 ]
机构：
[1] INST PHYS & CHEM RES,WAKO,SAITAMA,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1974年
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中图分类号：
O59 [应用物理学];
学科分类号：
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页码：1 / 4
页数：4
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