3-DIMENSIONAL SIMULATION OF LOCAL OXIDATION OF SILICON

被引：0

|

作者：

UMIMOTO, H

ODANAKA, S

机构：

来源：

1989 SYMPOSIUM ON VLSI TECHNOLOGY: DIGEST OF TECHNICAL PAPERS | 1989年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：47 / 48

页数：2

相关论文

共 50 条

[21] 3-DIMENSIONAL SILICON ELECTROSTATIC LINEAR MICROACTUATOR
TIROLE, N
HAUDEN, D
BLIND, P
FROELICHER, M
GAUDRIOT, L
SENSORS AND ACTUATORS A-PHYSICAL, 1995, 48 (02) : 145 - 150
[22] PHOTOELECTROCHEMICAL ETCHING OF 3-DIMENSIONAL STRUCTURES IN SILICON
EDDOWES, MJ
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1990, 137 (11) : 3514 - 3516
[23] Lamellar crystallization of silicon for 3-dimensional integration
Witte, D. J.
Crnogorac, F.
Pickard, D. S.
Mehta, A.
Liu, Z.
Rajendran, B.
Pianetta, P.
Pease, R. F. W.
MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) : 1186 - 1189
[24] TWO-DIMENSIONAL MODELING OF SILICON LOCAL OXIDATION
GRUDANOV, NB
VEREIKINA, MB
SIDORENKO, VP
IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII RADIOELEKTRONIKA, 1989, 32 (09): : 50 - 54
[25] FINITE-ELEMENT SIMULATION OF LOCAL OXIDATION OF SILICON
PONCET, A
IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, 1985, 4 (01) : 41 - 53
[26] LOCAL PROPERTIES OF 3-DIMENSIONAL SEPARATION LINES
HIRSCHEL, EH
KORDULLA, W
ZEITSCHRIFT FUR FLUGWISSENSCHAFTEN UND WELTRAUMFORSCHUNG, 1980, 4 (05): : 295 - 307
[27] 3-DIMENSIONAL TRIANGULATIONS FROM LOCAL TRANSFORMATIONS
JOE, B
SIAM JOURNAL ON SCIENTIFIC AND STATISTICAL COMPUTING, 1989, 10 (04): : 718 - 741
[28] 3-DIMENSIONAL LOCAL EFFECT AND SHELL THEORIES
TAHERI, S
INTERNATIONAL JOURNAL OF PRESSURE VESSELS AND PIPING, 1989, 36 (03) : 225 - 246
[29] A PSEUDOSPECTRAL ALGORITHM FOR 3-DIMENSIONAL MAGNETOHYDRODYNAMIC SIMULATION
SCHNACK, DD
BAXTER, DC
CARAMANA, EJ
JOURNAL OF COMPUTATIONAL PHYSICS, 1984, 55 (03) : 485 - 514
[30] NUMERICAL SIMULATION OF 3-DIMENSIONAL CONVECTIVE ELEMENTS
FOX, DG
BULLETIN OF THE AMERICAN METEOROLOGICAL SOCIETY, 1970, 51 (06) : 580 - &

← 1 2 3 4 5 →